华夏上证科创板半导体材料设备主题ETF
(588170)公募股票型指数型
重仓股明细
查询指定年度的基金持仓:
| 季报日期: 2026-03-31 |
| 序号 |
股票代码 |
股票名称 |
占净值比例 |
持股数量(万股) |
持股市值(万元) |
占股票市值比例(季报) |
持仓变动 |
| 1 |
688072 |
拓荆科技 |
10.76% |
234.87 |
86900.20 |
0.83% |
122.53 (52.17%) |
| 2 |
688120 |
华海清科 |
10.64% |
494.08 |
85970.01 |
1.40% |
257.97 (52.21%) |
| 3 |
688012 |
中微公司 |
9.97% |
263.03 |
80586.40 |
0.42% |
146.89 (55.85%) |
| 4 |
688361 |
中科飞测 |
7.89% |
419.47 |
63780.08 |
1.69% |
218.77 (52.15%) |
| 5 |
688019 |
安集科技 |
7.31% |
235.61 |
59061.59 |
1.35% |
123.17 (52.28%) |
| 6 |
688126 |
沪硅产业 |
6.99% |
3343.07 |
56497.96 |
1.22% |
1746.48 (52.24%) |
| 7 |
688037 |
芯源微 |
6.66% |
321.25 |
53827.91 |
1.59% |
167.35 (52.09%) |
| 8 |
688200 |
华峰测控 |
6.16% |
189.44 |
49785.52 |
1.40% |
99.00 (52.26%) |
| 9 |
688234 |
天岳先进 |
4.35% |
428.99 |
35134.09 |
1.00% |
224.21 (52.26%) |
| 10 |
688409 |
富创精密 |
3.41% |
305.78 |
27550.94 |
1.00% |
159.61 (52.20%) |
| 季报日期: 2026-03-31 |
| 序号 |
股票代码 |
股票名称 |
占净值比例 |
持股数量(万股) |
持股市值(万元) |
占股票市值比例(季报) |
持仓变动 |
| 1 |
688072 |
拓荆科技 |
10.76% |
234.87 |
86900.20 |
0.83% |
122.53 (52.17%) |
| 2 |
688120 |
华海清科 |
10.64% |
494.08 |
85970.01 |
1.40% |
257.97 (52.21%) |
| 3 |
688012 |
中微公司 |
9.97% |
263.03 |
80586.40 |
0.42% |
146.89 (55.85%) |
| 4 |
688361 |
中科飞测 |
7.89% |
419.47 |
63780.08 |
1.69% |
218.77 (52.15%) |
| 5 |
688019 |
安集科技 |
7.31% |
235.61 |
59061.59 |
1.35% |
123.17 (52.28%) |
| 6 |
688126 |
沪硅产业 |
6.99% |
3343.07 |
56497.96 |
1.22% |
1746.48 (52.24%) |
| 7 |
688037 |
芯源微 |
6.66% |
321.25 |
53827.91 |
1.59% |
167.35 (52.09%) |
| 8 |
688200 |
华峰测控 |
6.16% |
189.44 |
49785.52 |
1.40% |
99.00 (52.26%) |
| 9 |
688234 |
天岳先进 |
4.35% |
428.99 |
35134.09 |
1.00% |
224.21 (52.26%) |
| 10 |
688409 |
富创精密 |
3.41% |
305.78 |
27550.94 |
1.00% |
159.61 (52.20%) |
显示全部持仓明细>>
| 季报日期: 2025-12-31 |
| 序号 |
股票代码 |
股票名称 |
占净值比例 |
持股数量(万股) |
持股市值(万元) |
占股票市值比例(季报) |
持仓变动 |
| 1 |
688072 |
拓荆科技 |
10.08% |
112.34 |
37071.44 |
0.40% |
6.54 (5.82%) |
| 2 |
688120 |
华海清科 |
9.64% |
236.11 |
35435.15 |
0.67% |
62.84 (26.62%) |
| 3 |
688126 |
沪硅产业 |
9.40% |
1596.59 |
34550.30 |
0.58% |
613.78 (38.44%) |
| 4 |
688012 |
中微公司 |
8.61% |
116.14 |
31672.86 |
0.19% |
15.20 (13.09%) |
| 5 |
688361 |
中科飞测 |
8.35% |
200.70 |
30704.70 |
0.81% |
30.86 (15.38%) |
| 6 |
688019 |
安集科技 |
6.66% |
112.43 |
24501.27 |
0.67% |
23.28 (20.70%) |
| 7 |
688037 |
芯源微 |
6.22% |
153.90 |
22855.72 |
0.76% |
31.90 (20.73%) |
| 8 |
688234 |
天岳先进 |
4.95% |
204.78 |
18201.03 |
0.48% |
74.96 (36.60%) |
| 9 |
688200 |
华峰测控 |
4.68% |
90.45 |
17203.00 |
0.67% |
29.06 (32.13%) |
| 10 |
688082 |
盛美上海 |
4.39% |
91.61 |
16127.11 |
0.21% |
24.83 (27.11%) |
| 季报日期: 2025-12-31 |
| 序号 |
股票代码 |
股票名称 |
占净值比例 |
持股数量(万股) |
持股市值(万元) |
占股票市值比例(季报) |
持仓变动 |
| 1 |
688072 |
拓荆科技 |
10.08% |
112.34 |
37071.44 |
0.40% |
6.54 (5.82%) |
| 2 |
688120 |
华海清科 |
9.64% |
236.11 |
35435.15 |
0.67% |
62.84 (26.62%) |
| 3 |
688126 |
沪硅产业 |
9.40% |
1596.59 |
34550.30 |
0.58% |
613.78 (38.44%) |
| 4 |
688012 |
中微公司 |
8.61% |
116.14 |
31672.86 |
0.19% |
15.20 (13.09%) |
| 5 |
688361 |
中科飞测 |
8.35% |
200.70 |
30704.70 |
0.81% |
30.86 (15.38%) |
| 6 |
688019 |
安集科技 |
6.66% |
112.43 |
24501.27 |
0.67% |
23.28 (20.70%) |
| 7 |
688037 |
芯源微 |
6.22% |
153.90 |
22855.72 |
0.76% |
31.90 (20.73%) |
| 8 |
688234 |
天岳先进 |
4.95% |
204.78 |
18201.03 |
0.48% |
74.96 (36.60%) |
| 9 |
688200 |
华峰测控 |
4.68% |
90.45 |
17203.00 |
0.67% |
29.06 (32.13%) |
| 10 |
688082 |
盛美上海 |
4.39% |
91.61 |
16127.11 |
0.21% |
24.83 (27.11%) |
| 11 |
688981 |
中芯国际 |
2.97% |
88.97 |
10927.90 |
3.01% |
--- |
| 12 |
688409 |
富创精密 |
2.68% |
146.17 |
9851.75 |
2.71% |
--- |
| 13 |
688652 |
京仪装备 |
2.57% |
96.13 |
9450.13 |
2.60% |
--- |
| 14 |
688233 |
神工股份 |
1.86% |
97.54 |
6830.88 |
1.88% |
--- |
| 15 |
688146 |
中船特气 |
1.66% |
151.30 |
6112.71 |
1.68% |
--- |
| 16 |
688106 |
金宏气体 |
1.46% |
274.83 |
5383.97 |
1.48% |
--- |
| 17 |
688535 |
华海诚科 |
1.40% |
45.94 |
5149.33 |
1.42% |
--- |
| 18 |
688549 |
中巨芯 |
1.39% |
561.08 |
5117.09 |
1.41% |
--- |
| 19 |
688432 |
有研硅 |
1.20% |
355.99 |
4417.88 |
1.22% |
--- |
| 20 |
688584 |
上海合晶 |
1.13% |
189.95 |
4167.51 |
1.15% |
--- |
| 21 |
688720 |
艾森股份 |
1.13% |
58.82 |
4139.78 |
1.14% |
--- |
| 22 |
688545 |
兴福电子 |
1.05% |
103.18 |
3874.41 |
1.07% |
--- |
| 23 |
688661 |
和林微纳 |
1.02% |
72.51 |
3753.07 |
1.03% |
--- |
| 24 |
688605 |
先锋精科 |
1.01% |
57.91 |
3721.11 |
1.02% |
--- |
| 25 |
688383 |
新益昌 |
0.83% |
38.96 |
3049.09 |
0.84% |
--- |
| 26 |
688001 |
华兴源创 |
0.70% |
84.87 |
2561.47 |
0.70% |
--- |
| 27 |
688478 |
晶升股份 |
0.67% |
65.93 |
2466.62 |
0.68% |
--- |
| 28 |
688721 |
龙图光罩 |
0.48% |
38.15 |
1775.16 |
0.49% |
--- |
| 29 |
688530 |
欧莱新材 |
0.34% |
76.10 |
1251.07 |
0.34% |
--- |
| 30 |
688419 |
耐科装备 |
0.25% |
32.72 |
915.89 |
0.25% |
--- |
| 31 |
688795 |
摩尔线程 |
0.03% |
0.23 |
96.60 |
0.03% |
--- |
| 32 |
688802 |
沐曦股份 |
0.01% |
0.08 |
32.50 |
0.01% |
--- |
| 33 |
603248 |
锡华科技 |
0.00% |
0.03 |
0.42 |
0.00% |
--- |
| 34 |
688783 |
西安奕材 |
0.00% |
0.78 |
14.38 |
0.00% |
--- |
| 35 |
688759 |
必贝特 |
0.00% |
0.28 |
7.00 |
0.00% |
--- |
| 36 |
688790 |
昂瑞微 |
0.00% |
0.05 |
6.05 |
0.00% |
--- |
| 37 |
688809 |
强一股份 |
0.00% |
0.03 |
5.27 |
0.00% |
--- |
| 38 |
688729 |
屹唐股份 |
0.00% |
0.12 |
2.90 |
0.00% |
--- |
| 39 |
688727 |
恒坤新材 |
0.00% |
0.06 |
1.96 |
0.00% |
--- |
| 40 |
688796 |
百奥赛图 |
0.00% |
0.04 |
1.79 |
0.00% |
--- |
| 41 |
688807 |
优迅股份 |
0.00% |
0.01 |
1.78 |
0.00% |
--- |
| 42 |
688805 |
健信超导 |
0.00% |
0.03 |
0.86 |
0.00% |
--- |
| 43 |
603175 |
超颖电子 |
0.00% |
0.02 |
0.82 |
0.00% |
--- |
| 44 |
603092 |
德力佳 |
0.00% |
0.01 |
0.81 |
0.00% |
--- |
| 45 |
603418 |
友升股份 |
0.00% |
0.01 |
0.79 |
0.00% |
--- |
| 46 |
601026 |
道生天合 |
0.00% |
0.05 |
0.64 |
0.00% |
--- |
| 47 |
603406 |
天富龙 |
0.00% |
0.01 |
0.47 |
0.00% |
--- |
| 48 |
603262 |
技源集团 |
0.00% |
0.02 |
0.44 |
0.00% |
--- |
| 49 |
603370 |
华新精科 |
0.00% |
0.01 |
0.38 |
0.00% |
--- |
| 50 |
603376 |
大明电子 |
0.00% |
0.01 |
0.29 |
0.00% |
--- |
| 51 |
603334 |
丰倍生物 |
0.00% |
0.01 |
0.29 |
0.00% |
--- |
显示全部持仓明细>>
| 季报日期: 2025-09-30 |
| 序号 |
股票代码 |
股票名称 |
占净值比例 |
持股数量(万股) |
持股市值(万元) |
占股票市值比例(季报) |
持仓变动 |
| 1 |
688012 |
中微公司 |
10.82% |
100.94 |
30179.51 |
0.16% |
87.59 (86.78%) |
| 2 |
688120 |
华海清科 |
10.26% |
173.27 |
28623.63 |
0.49% |
157.89 (91.13%) |
| 3 |
688072 |
拓荆科技 |
9.87% |
105.80 |
27526.06 |
0.38% |
91.78 (86.76%) |
| 4 |
688126 |
沪硅产业 |
9.09% |
982.82 |
25356.69 |
0.36% |
853.00 (86.79%) |
| 5 |
688019 |
安集科技 |
7.30% |
89.16 |
20366.66 |
0.53% |
77.38 (86.79%) |
| 6 |
688361 |
中科飞测 |
7.06% |
169.84 |
19706.09 |
0.68% |
147.40 (86.79%) |
| 7 |
688037 |
芯源微 |
6.52% |
122.00 |
18178.48 |
0.61% |
105.88 (86.79%) |
| 8 |
688082 |
盛美上海 |
4.83% |
66.77 |
13475.17 |
0.15% |
57.93 (86.76%) |
| 9 |
688200 |
华峰测控 |
4.58% |
61.39 |
12787.08 |
0.45% |
53.25 (86.74%) |
| 10 |
688234 |
天岳先进 |
3.82% |
129.83 |
10666.45 |
0.30% |
112.61 (86.74%) |
| 季报日期: 2025-09-30 |
| 序号 |
股票代码 |
股票名称 |
占净值比例 |
持股数量(万股) |
持股市值(万元) |
占股票市值比例(季报) |
持仓变动 |
| 1 |
688012 |
中微公司 |
10.82% |
100.94 |
30179.51 |
0.16% |
87.59 (86.78%) |
| 2 |
688120 |
华海清科 |
10.26% |
173.27 |
28623.63 |
0.49% |
157.89 (91.13%) |
| 3 |
688072 |
拓荆科技 |
9.87% |
105.80 |
27526.06 |
0.38% |
91.78 (86.76%) |
| 4 |
688126 |
沪硅产业 |
9.09% |
982.82 |
25356.69 |
0.36% |
853.00 (86.79%) |
| 5 |
688019 |
安集科技 |
7.30% |
89.16 |
20366.66 |
0.53% |
77.38 (86.79%) |
| 6 |
688361 |
中科飞测 |
7.06% |
169.84 |
19706.09 |
0.68% |
147.40 (86.79%) |
| 7 |
688037 |
芯源微 |
6.52% |
122.00 |
18178.48 |
0.61% |
105.88 (86.79%) |
| 8 |
688082 |
盛美上海 |
4.83% |
66.77 |
13475.17 |
0.15% |
57.93 (86.76%) |
| 9 |
688200 |
华峰测控 |
4.58% |
61.39 |
12787.08 |
0.45% |
53.25 (86.74%) |
| 10 |
688234 |
天岳先进 |
3.82% |
129.83 |
10666.45 |
0.30% |
112.61 (86.74%) |
显示全部持仓明细>>
| 季报日期: 2025-06-30 |
| 序号 |
股票代码 |
股票名称 |
占净值比例 |
持股数量(万股) |
持股市值(万元) |
占股票市值比例(季报) |
持仓变动 |
| 1 |
688120 |
华海清科 |
10.29% |
15.37 |
2593.37 |
10.36% |
--- |
| 2 |
688012 |
中微公司 |
9.65% |
13.35 |
2432.87 |
9.72% |
--- |
| 3 |
688126 |
沪硅产业 |
9.64% |
129.82 |
2430.28 |
9.71% |
--- |
| 4 |
688072 |
拓荆科技 |
8.55% |
14.01 |
2153.69 |
8.60% |
--- |
| 5 |
688361 |
中科飞测 |
7.50% |
22.44 |
1889.17 |
7.55% |
--- |
| 6 |
688019 |
安集科技 |
7.09% |
11.78 |
1787.67 |
7.14% |
--- |
| 7 |
688037 |
芯源微 |
6.86% |
16.12 |
1728.04 |
6.90% |
--- |
| 8 |
688200 |
华峰测控 |
4.66% |
8.14 |
1173.90 |
4.69% |
--- |
| 9 |
688082 |
盛美上海 |
4.00% |
8.84 |
1007.39 |
4.02% |
--- |
| 10 |
688234 |
天岳先进 |
4.00% |
17.22 |
1008.14 |
4.03% |
--- |
| 季报日期: 2025-06-30 |
| 序号 |
股票代码 |
股票名称 |
占净值比例 |
持股数量(万股) |
持股市值(万元) |
占股票市值比例(季报) |
持仓变动 |
| 1 |
688120 |
华海清科 |
10.29% |
15.37 |
2593.37 |
10.36% |
--- |
| 2 |
688012 |
中微公司 |
9.65% |
13.35 |
2432.87 |
9.72% |
--- |
| 3 |
688126 |
沪硅产业 |
9.64% |
129.82 |
2430.28 |
9.71% |
--- |
| 4 |
688072 |
拓荆科技 |
8.55% |
14.01 |
2153.69 |
8.60% |
--- |
| 5 |
688361 |
中科飞测 |
7.50% |
22.44 |
1889.17 |
7.55% |
--- |
| 6 |
688019 |
安集科技 |
7.09% |
11.78 |
1787.67 |
7.14% |
--- |
| 7 |
688037 |
芯源微 |
6.86% |
16.12 |
1728.04 |
6.90% |
--- |
| 8 |
688200 |
华峰测控 |
4.66% |
8.14 |
1173.90 |
4.69% |
--- |
| 9 |
688082 |
盛美上海 |
4.00% |
8.84 |
1007.39 |
4.02% |
--- |
| 10 |
688234 |
天岳先进 |
4.00% |
17.22 |
1008.14 |
4.03% |
--- |
| 11 |
688409 |
富创精密 |
3.35% |
15.34 |
843.72 |
3.37% |
--- |
| 12 |
688981 |
中芯国际 |
2.97% |
8.48 |
747.58 |
2.99% |
--- |
| 13 |
688106 |
金宏气体 |
2.06% |
28.97 |
518.26 |
2.07% |
--- |
| 14 |
688652 |
京仪装备 |
1.91% |
8.42 |
482.36 |
1.93% |
--- |
| 15 |
688146 |
中船特气 |
1.83% |
15.91 |
459.99 |
1.84% |
--- |
| 16 |
688549 |
中巨芯 |
1.82% |
59.20 |
458.19 |
1.83% |
--- |
| 17 |
688535 |
华海诚科 |
1.65% |
4.85 |
416.87 |
1.66% |
--- |
| 18 |
688432 |
有研硅 |
1.64% |
37.49 |
413.93 |
1.65% |
--- |
| 19 |
688584 |
上海合晶 |
1.42% |
20.00 |
357.57 |
1.43% |
--- |
| 20 |
688233 |
神工股份 |
1.29% |
10.24 |
325.20 |
1.30% |
--- |
| 21 |
688661 |
和林微纳 |
1.20% |
7.61 |
302.56 |
1.21% |
--- |
| 22 |
688605 |
先锋精科 |
1.01% |
4.05 |
254.04 |
1.01% |
--- |
| 23 |
688720 |
艾森股份 |
0.90% |
5.30 |
226.68 |
0.91% |
--- |
| 24 |
688001 |
华兴源创 |
0.89% |
8.92 |
225.48 |
0.90% |
--- |
| 25 |
688478 |
晶升股份 |
0.84% |
6.93 |
212.07 |
0.85% |
--- |
| 26 |
688383 |
新益昌 |
0.82% |
4.08 |
207.67 |
0.83% |
--- |
| 27 |
688721 |
龙图光罩 |
0.48% |
2.67 |
120.37 |
0.48% |
--- |
| 28 |
688419 |
耐科装备 |
0.36% |
2.46 |
91.72 |
0.37% |
--- |
| 29 |
688355 |
明志科技 |
0.35% |
4.96 |
87.19 |
0.35% |
--- |
| 30 |
688530 |
欧莱新材 |
0.31% |
4.81 |
79.21 |
0.32% |
--- |
| 31 |
688775 |
影石创新 |
0.01% |
0.02 |
2.57 |
0.01% |
--- |
| 32 |
603400 |
华之杰 |
0.00% |
0.01 |
0.25 |
0.00% |
--- |
| 33 |
603049 |
中策橡胶 |
0.00% |
0.01 |
0.48 |
0.00% |
--- |
| 34 |
603382 |
海阳科技 |
0.00% |
0.01 |
0.24 |
0.00% |
--- |
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